Professor of Electrical Engineering
Khuri-Yakub develops micromachined silicon sensors and actuators such as airborne and water immersion ultrasonic transducers and arrays, medical ultrasound imaging systems, sensors in bio-fluidic channels, micromachined microphones, fluid ejectors, and chemical/biological sensors. He is also active in developing in-situ sensors (temperature, film thickness, resist cure) for process monitoring and process control of integrated circuits manufacturing processes.
Department: Electrical Engineering
Location: Spilker 217
Phone: 650-723-0718
Email: khuri-yakub@stanford.edu
